MEMS Capacitive Accelerometer VCOE-5320A

          The 5320A is a high-precision triaxial MEMS accelerometer with variable capacitance MEMS sensitive element that simultaneously outputs acceleration signals in all three axial directions, and features air damping and over-range stopper design that allows the MEMS sensitive element to withstand very high shock. With very high temperature stability and accuracy, it is specifically designed for acceleration measurements at low vibration levels in the aerospace and automotive sectors. Typical applications include vibration testing in an automotive post-crash overall body triaxial motion measurement environment.