Synopsis
TAS-01A series triaxial solid-state accelerometers are sensors for measuring triaxial vibration acceleration. Each of the three-axis acceleration sensors adopts high-precision MEMS chip, which has high performance, low price, high reliability and high package robustness, and has temperature sensor output, Self-Test function, and can realize temperature compensation and BIT (Built-In-Test). It can be used in automotive measurement and control, inertial navigation, seismic monitoring, medical equipment, tilt, speed and position measurement, vibration and shock test bench acceleration measurement and other systems.
principle
The TAS-01A acceleration sensor is a surface MEMS poly-silicon structure built on top of a silicon wafer. Poly-silicon reeds are suspended from the structure on the surface of the wafer and provide a resistance to overcome the acceleration sensing force. A differential capacitor mechanism consisting of two independent fixed plates and a central plate connected to a moving mass is used to measure the deflection of the poly-silicon structure proportional to the acceleration, thus generating a voltage output signal.
Application Case
It can be used in automotive measurement and control, inertial navigation, seismic monitoring, medical equipment, tilt, speed and position measurements, vibration and shock test bench acceleration measurement systems, etc.
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