The SiAOE200 is a capacitive body MEMS accelerometer designed for inertial applications. The SiAOE200 offers significant advantages in terms of long-term stability, scale factor repeatability, low runtime bias, vibration rectification error, and low noise. Integrated signal conditioning, analog ±2.7V output, built-in self-test circuitry, and a temperature sensor allow for user compensation. This provides efficient and reliable support for tactical level measurements.